It is mainly used in etching of the metal surface of
the integrated circuit, and rinsing of silicon chip
and integrated circuit, etc..It has two types, which
is super large-scale integrated circuit grade (VLSI
grade) and standard electronic grade (EL grade).
The product index is in conform with the standard
requirement of Q/AB008-2005
| Item |
Index |
| VLSI
Grade |
EL
Grade |
| 1. Content,
% (W/W)
 |
30 |
30 |
| 2. Free
acid( based on H2SO4),
PPM  |
30 |
30 |
| 3. involatile
substance,
PPM
|
20 |
-
|
| 4. Organic
carbon (TOC),
PPM |
-
|
20 |
| 5. Chloride(Cl),
PPM |
0.5 |
0.5 |
| 6. Phosphate(PO4),
PPM
|
1 |
2 |
| 7. sulfate(SO4),
PPM |
1 |
5 |
| 8. Total
nitrogen(N),
PPM
|
2 |
-
|
| 9. Fe
,
PPM |
0.03 |
0.05 |
| 10.
Ni,
PPM
|
0.01 |
0.05 |
| 11.
Cu,
PPM
|
0.01 |
0.05 |
| 12.
Cd,
PPM
|
0.01 |
0.05 |
| 13.
Pb,
PPM
|
0.01 |
0.3 |
| 14.
As,
PPM
|
0.01 |
0.01 |
| 15.
Al,
PPM
|
0.1 |
0.5 |
| 16.
Cr,
PPM
|
0.01 |
0.05 |
| 17.
Zn,
PPM
|
0.05 |
0.1 |
| 18.
Ca,
PPM
|
0.05 |
0.2 |
| 19.
Mg,
PPM
|
0.05 |
0.1 |
| 20.
Na,
PPM
|
0.05 |
0.5 |
| 21.
K,
PPM |
0.05 |
0.5 |
| 22.
Mn,
PPM
|
0.01 |
0.05 |
| 23.
Mo,
PPM
|
0.01 |
-
|
| 24.
Ti,
PPM
|
0.01 |
0.3 |
| 25.
B,
PPM
|
0.02 |
0.1 |
| 26.
Sn,
PPM
|
0.02 |
1 |
| 27.
Au,
PPM
|
0.02 |
0.3 |
| 28.
Ag,
PPM
|
0.02 |
-
|
| 29.
NH4,
PPM |
2 |
-
|
| 30.
Ba,
PPM
|
0.05 |
-
|
| 31.
Co,
PPM
|
0.01 |
-
|
| 32.
Pt,
PPM
|
0.02 |
-
|
| 33.
Bi,
PPM
|
0.02 |
-
|
| 34.
In,
PPM
|
0.02 |
-
|
| 35.
Li,
PPM
|
0.01 |
-
|
| 36.
Sr,
PPM
|
0.01 |
-
|
| 37.
Tl,
PPM
|
0.02 |
-
|
| 38.
Be,
PPM
|
0.01 |
-
|
| 39.
Ga,
PPM
|
0.02 |
-
|
| 40.
Ge,
PPM
|
0.02 |
-
|
| 41.
V,
PPM |
0.01 |
-
|
| 42.
Zr,
PPM
|
0.01 |
-
|
|
Superpure
electronic hydrogen peroxide
